BEGIN:VCALENDAR
PRODID:-//AT Content Types//AT Event//EN
VERSION:1.0
BEGIN:VEVENT
DTSTART:20080130T210000Z
DTEND:20080130T220000Z
DCREATED:20110125T003243Z
UID:ATEvent-61fd5ce8f7c572b0ac813d80dec81cd7
SEQUENCE:0
LAST-MODIFIED:20110215T021920Z
SUMMARY:Lithography Physics\, Models and Technology Pathways to 7nm Half-Pitch
LOCATION:54-134 EIV
PRIORITY:3
TRANSP:0
END:VEVENT
END:VCALENDAR