Francis F. Chen

Francis F. Chen

Francis F. Chen
Professor Emeritus
Primary Area: Physical and Wave Electronics

Office: 6532D Boelter Hall
Phone: (310) 825-5624
E-mail:
Personal Web: http://www.seas.ucla.edu/~ffchen/index.htm

 
Research and Teaching Interests:
Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)