T.
G. Madziwa, F.F. Chen, and D. Arnush, Ion trajectories in
electron-shading damage, American Vacuum Society, Denver, Nov. 3,
2002. PPT
F.F.
Chen, Evolution of rf plasma sources, American Vacuum Society,
Baltimore, Nov. 4, 2003. PPT
F.F.
Chen, RF plasma sources for semiconductor processing, International
School of Advance Plasma Technology, Varenna,
Italy, Sept. 27 - Oct. 1, 2004. PPT
F.F.
Chen, Electron probe currents in ICPs, poster paper, Amer. Vac. Soc.,
Anaheim, CA, Nov. 14, 2004. PPT
F.F.
Chen, A helicon plasma source for large-area materials
processing, NSF DMII Grantees Conference, Scottsdale, Arizona, Jan.
3, 2005. PPT
F.F.
Chen,
RF Plasma Sources for
Semiconductor Processing, 2nd Int'l School of
Advanced Plasma Technology, Varenna, Italy, Sept. 2004). PPT
F.F. Chen, Nonlinear effects and anomalous transport in rf plasmas,
Workshop on Nonlocal, Collisionless
Electron Transport in Plasmas, Princeton, August 2005. PPT
F.F.
Chen, RF Langmuir probes, revisited, 58th Gaseous Electronics
Conference, San Jose, CA, Oct. 17, 2005. PPT
F.F.
Chen, Large-area helicon source with permanent magnets, Int'l
Conference on Plasma Physics, Kiev, Ukraine, May 24, 2006. PPT
F.F.
Chen, Helicons, a physics dilemma solved, Tsing Hua Univ.,
Taiwan, March 2008. PPT
F.F.
Chen, Low temperature plasma physics and plasma processing, INER,
Taiwan, March, 2008. PPT
F.F.
Chen, Use of Langmuir probes in RF plasmas, INER, Taiwan, March,
2008. PPT
F.F.
Chen, Development and physics of RF plasma sources, INER, Taiwan,
March, 2008. PPT
F.F.
Chen, Distributed helicon sources with permanent magnets, INER,
Taiwan, March, 2008. PPT
Computational programs
Probe
analysis programs (Excel)
These
programs are made available for public use only if proper acknowledgment
is made in resulting publications or patents.
Orbital Motion Limited theory: ESP_OML.xls
Bernstein-Rabinowitz-Laframboise theory: ESP_BRL.xls
Allen-Boyd-Reynolds theory: ESP_ABR.xls
Floating potential method: ESP_FP.xls
Instruction manual for probe programs: Probe
manual.doc
Helicon
waves and antennas (C++)
This
program is made available for public use only if proper acknowledgment
is made in resulting publications or patents.
Helic 1.0 is the latest and probably final version of HELIC, since Don
Arnush passed away in 2003. The
following .EXE file is a self-extracting ZIP file. First create a
new folder, e.g. "Helic", and extract to it.
Included are Word and PDF copies of the Instructions and the Equations (which are also in the Help
section of the program). With all the files in the
same folder, the program is started by double-clicking on
Helic10.exe. By clicking Start.exe, you can access the DOC and
PDF files, and also install the program to another directory. If all
the files are written to a CD, the opening menu for installation will
appear automatically.
Helic10zip.exe
Matching
circuit design
Multitube
match.xls
Permanent
magnets
This
program is made available for public use only if proper acknowledgment
is made in resulting publications or patents.
Computation
of PM fields and lines: BfieldMsetup.exe
Instructions:
Instructions for
BFieldM
program.pdf
