MEMS Physics and Design
UCLA Electrical /Mechanical & Aerospace /Biomedical Engineering
EE M250B     /     MAE M282     /     BME M250B

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Registration Infomation
Outline & Lecture Notes
Literature
Homeworks
Midterm/Final
Project Requirements
Project Teams
Useful Links
Announcement

Instructor:   Prof. Ming Wu     (66-147D Eng-4, wu@ee.ucla.edu)

Time:            MW 2:00 – 3:50 pm

Room:          9436 Boelter Hall 

Prerequisite:   EE 250A, or EE151A or equivalent (Understanding of MEMS Fabrication Processes)

Office Hours:   Wed 4 – 5 or by email appointment.

Textbook:    • Steve Senturia, Microsystem Design, Kluwer Academic Publishers, 2001

Reference Books:  

Greg Kovacs, Micromachined Transducers Sourcebook, McGraw Hill, 1998
Nadim Maluf, An Introduction to Microelectromechanical Systems Engineering, Artech House, 2000

Grading         Midterm: 30%,     Final: 50%,      Project: 20%