Francis F. Chen, Professor Emeritus
Electrical Engineering Department
University of California, Los Angeles
Prof. Chen is a plasma physicist with a
career extending over 52 years and encompassing both experiment and
theory. He has devoted about a decade each to the subfields of magnetic
fusion, laser fusion, plasma diagnostics, basic plasma physics, and
low-temperature plasma physics. Most plasma students are familiar with his
textbook Introduction to Plasma Physics and Controlled Fusion. His
current interest is in plasma processing of semiconductor circuits, especially
the radiofrequency sources used to make computer chips, and in the physical
processes that permit etching millions of transistors on a single chip. To
learn more about this, please visit the site for UCLA's Low Temperature Plasma
Technology Laboratory (LTPTL).
This site also contains downloads of recent presentations and useful
computational programs.
Though formally retired from teaching,
Prof. Chen still maintains an active research group.
