MEMS-in-TEM for In Situ Observation of Nano Mechanical, Thermal & Chemical Phenomena

Speaker: Professor Hiroyuki Fujita
Affiliation: Tokyo City University


Abstract: While MEMS sensors are widely used in cellular phones and automobiles, MEMS actuators open new possibilities in nano scientific investigation. For nano science, MEMS enables the electro-mechano-thermal characterization of nano contacts in transmission electron microscope (TEM) for in situ atomic level observation of its shape and dimensions. We conducted the tensile and shear testing, and the heat transfer measurement of nano junctions while the junctions were in situ observed by TEM. The tensile testing of a silicon junction of a few nm in diameter showed its extraordinarily large plastic deformation. The shear deformation of a silver nano junction exhibited series of sub-nm steps correlated with the crystalline distance of the material; this is like a miniaturized version of stick-slips during frictional motion. The heat transfer through a short and thin, both in a few nm, junction was enhanced because of ballistic heat transfer. Furthermore, MEMS-based TEM liquid cells allow us to observe phenomena in liquid with the resolution of a few nm. Active MEMS liquid cells allow the observation of the electrochemical, thermal and ion-exchange phenomena.

Biosketch: Hiroyuki Fujita is Director of Advanced Research Laboratory of Cannon Medical Systems Corporation from 2017. He is also a Professor of Tokyo City University and a Professor Emeritus of Institute of Industrial Science, University of Tokyo. He was a visiting professor in MIT and UC Berkeley. He received the B.S., M.S. and Ph.D. degrees in Electrical Engineering from University of Tokyo in 1975, 1977 and 1980, respectively. He is currently engaged in the investigation of MEMS/NEMS and applications to bio/nano technology and IoT. Major research projects include MEMS-in-TEM experiment for simultaneous visualization and measurement of nanomaterials, vibrational energy harvesters using ionic liquids, and bio molecular/cellular characterization using MEMS tools. He has published more than 300 academic papers. He received many awards including l’Ordre des Palmes Academiques from Government of France and IEEE EDS Rober Bosch Micro and Nano Electro Mechanical Systems Award.

For more information, please contact Prof. CJ Kim at All faculty, students, and guests are welcome to this event.

Date(s) - Sep 13, 2019
11:00 am - 12:00 pm

Mong Learning Center – EE-VI – #180
404 Westwood Plaza , Los Angeles California 90095