Francis F. Chen

Francis F. Chen

Francis F. Chen
Professor Emeritus
Primary Area: Physical and Wave Electronics

Office: 6532D Boelter Hall
Phone: (310) 825-5624
Personal Web:

Research and Teaching Interests:
Radiofrequency plasma sources for industrial applications. He invented the “helicon” source with permanent magnets, applied to semiconductor etching and spacecraft propulsion. Heads Low Temperature Plasma Technology Laboratory (LTPTL)
Awards and Recognitions


Fusion Power Associates Distinguished Career Award for his decades of outstanding achievements in science and education relating to plasma physics and fusion